JSSC 2006第12期Other0.5μm CMOS

A 45-mW Closed-Loop 16Micro-Gravity CMOS SOI Accelerometer

本文介绍了一种用于闭环操作的3V开关电容CMOS接口电路的设计、实现和特性分析，应用于横向电容微重力SOI加速度计。

4μg/√Hz分辨率，95dB动态范围，2-8μg偏置不稳定性，4.5mW功耗

SOI加速度计开关电容闭环操作微重力CMOS接口电路

▸前端可编程无参考电容开关电容电荷放大器

▸后端二阶开关电容调制器

▸通过反馈环路提高系统动态范围20dB

Abstract

In this paper, design, implementation and character- ization of a 3-V switched-capacitor (SC) /1/6CMOS interface cir- cuit for the closed-loop operation of a lateral capacitive micro- gravity silicon-on-insulator (SOI) accelerometer is presented. The interface circuit is based on a front-end programmable reference- capacitorless SC charge ampliﬁer and a back-end second-order SC /1/6modulator. The accelerometer is fabricated through a dry-re- lease high aspect-ratio reduced-gap process. By incorp