← 返回 JSSC 论文列表JSSC 2006第12期Power Management0.7μm CMOS
A CMOS Temperature-to-Frequency Converter With an Inaccuracy of Less Than 05 C 3
本文介绍了一种在标准CMOS工艺中实现的温度-频率转换器，其温度误差小于0.5°C。
温度误差小于0.5°C（3σ），工业温度范围（-40°C至105°C）
温度-频率转换器CMOS电热滤波器频率锁定环温度传感器
▸使用电热滤波器的相位偏移作为频率决定因素
▸通过热路径几何形状和热扩散率实现高精度
▸采用频率锁定环（FLL）技术
Abstract
This paper describes a temperature-to-frequency
converter (TFC) implemented in a standard CMOS process.
Its output frequency is determined by the phase-shift of an
electrothermal filter, which consists of a heater and a tempera-
ture sensor realized in the substrate of a standard CMOS chip.
The filter’s phase-shift is determined by the geometry of the
thermal path between the heater and the sensor, and by the
temperature-dependent rate at which heat diffuses through the
substrate. The resulting te