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CMOS DNA Sensor Array With Integrated A/D Conversion Based on Label-Free
本文介绍了一种基于0.5微米CMOS技术的无标记DNA传感器芯片，适用于低成本高集成应用。
0.5μm CMOS, 5V
CMOSDNA传感器无标记检测电容变化模数转换
▸创新点1：128个传感器阵列的高密度集成（方法创新）。该芯片实现了128个金电极传感器的高密度阵列布局，通过CMOS工艺在0.5微米技术节点上完成，显著提高了单位面积的检测通量，适用于低成本、高集成度的DNA检测应用。
▸创新点2：片上集成测量与模数转换电路（电路创新）。芯片内置信号调理、多路复用和模数转换电路，直接输出数字信号，避免了传统方案中外部仪器的依赖，提升了系统便携性和抗干扰能力，支持5V电源供电。
▸创新点3：基于电容变化的无标记DNA杂交检测（方法创新）。利用金电极表面DNA杂交引起的电容变化进行检测，无需荧光标记，简化了样品制备流程，实验验证了特异性、重复性和并行检测能力。
▸创新点4：共价探针修饰的金电极生物接口（材料与工艺创新）。通过共价结合固定已知序列的DNA探针，增强了生物分子识别的稳定性和灵敏度，为CMOS与生物传感的异质集成提供了可靠方案。
Abstract
This paper presents a fully electronic label-free DNA chip in 0.5- m CMOS technology, with 5-V supply voltage, suit- able for low-cost highly integrated applications. The chip features an array of 128 sensor sites with gold electrodes and integrated measurement, conditioning, multiplexing and analog-to-digital conversion circuitry. The circuits measure capacitance varia- tions due to DNA hybridization on the gold electrodes which are bio-modified by covalently attaching probes of known sequence. Specificity, repeatability and parallel detection capability of the fabricated chip are successfully demonstrated.