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JSSC 2008第7期OtherSOI

Light Source Position Measurement Technique Applicable in SOI Technology Christian Koch, Jürgen Oehm, Jannik Emde, and

提出一种适用于SOI技术的远距离光源位置测量方法
高灵敏度光学传感器
光学传感器SOI技术角度检测低成本集成光学
利用SOI CMOS技术实现完美器件隔离
利用金属层的不透明性和SiO2的透光性
无需额外光学组件即可测量光源角度
Abstract
e Abstract—Integrated optical sensors make use of a p-n-junction for light intensity detection, typically. Because of the costs, addi- tional optical components are not available in standard integration processes. Therefore, in higher level optical sensors extra optical components are not part of an integration. In this paper a concept for integration is proposed, which especially allows to measure the angles of a far distance light source relative to the surface of the chip and the coordinate s