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JSSC 2008第7期Image Sensors0.5μm/0.35μm

Time-of-Flight 3-D Imaging Pixel Structures in Standard CMOS Processes Daniel Du

研究标准CMOS工艺下的TOF 3D成像像素结构及其应用。
0.5μm和0.35μm CMOS工艺
TOF成像CMOS工艺像素结构近红外电荷耦合
电荷注入光栅(CI-PG)的应用
基于反向偏置p-n结的像素结构
MOS-C光电探测器的像素配置
Abstract
In this investigation we examine different pixel struc- tures and readout principles to be used in imagers fabricated in standard CMOS processes, for example, the 0.5 m and 0.35 m processes available at the Fraunhofer IMS. The targeted applications are high-speed near-infra-red (NIR) 3-D imaging based on time-of-flight (TOF) measurements. We discuss various issues ranging from charge-coupling possibilities to noise, spectral responsivity and fill-factor , and present an extensive study of pixel co