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JSSC 2009第8期Other45nm

Measurement and Analysis of Variability in 45 nm Strained-Si CMOS Technology

研究45纳米应变硅CMOS技术中的变异性测量与分析
45nm CMOS, 变异性分析, 延迟特性, 漏电流测量
45纳米应变硅CMOS变异性环形振荡器
使用环形振荡器阵列进行延迟特性分析
通过片上ADC测量晶体管漏电流
分析布局引起的系统变异性及其原因
Abstract
ember , IEEE, Costas J. Spanos , Fellow, IEEE, and Borivoje Nikolic´, Senior Member , IEEE Abstract—A test-chip in a low-power 45 nm technology, fea- turing uniaxial strained-Si, has been built to study variability in CMOS circuits. Systematic layout-induced variation, die-to-die (D2D), wafer-to-wafer (W2W) and within-die (WID) variability has been measured over multiple wafers, analyzed and attributed to likely causes in the manufacturing process. Delay is charac- terized using an array of ring