Abstract
Kämäräinen , Student Member , IEEE ,
Erkka Laulainen, Student Member , IEEE, Mikko Saukoski , Member , IEEE, Lauri Koskinen , Member , IEEE,
Marko Kosunen, Member , IEEE, and Kari A. I. Halonen , Member , IEEE
Abstract—In this paper, a micropower interface IC for a
capacitive 3-axis micro-accelerometer is presented. The IC is
implemented in a 0.25-
m CMOS process. The fully-integrated
sensor interface is based on a /1/6 sensor front-end that operates
mechanically in an open-loop configuration an