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Silicon Resonator Based 32 22W Real Time Clock With 10 ppm Frequency Accuracy Da
基于硅谐振器的超低功耗实时时钟，频率精度达10 ppm。
1MHz, 3.2μW@1V, 10ppm精度, 0-50°C
硅谐振器实时时钟温度补偿MEMS超低功耗
▸采用分数分频和频率插值结合的调谐方案
▸双振荡器温度测量概念实现高分辨率
▸无需PLL即可实现频率补偿
Abstract
ezous, and Guido Spinola-Durante , Member , IEEE
Abstract—This paper presents an ultra-low power generic
compensation scheme that is used to implement a real time clock
based on an AlN-driven 1 MHz uncompensated silicon resonator
achieving 3.2
W power dissipation at 1 V and
10 ppm fre-
quency accuracy over a 0–50
/67temperature range. It relies on
the combination of fractional division and frequency interpolation
for coarse and fine tuning respectively. By proper calibration and
application of