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JSSC 2011第1期Other90nm

Demonstration of Integrated Micro-Electro- Mechanical Relay Circuits for VLSI Ap

展示用于VLSI应用的集成微机电继电器电路及其设计技术。
90nm技术节点,32位MEM继电器加法器,能效提升10倍
加法器数字电路MEM继电器微机电设备超大规模集成
开发混合机电模型
预测90nm技术节点的MEM继电器性能
展示32位MEM继电器加法器的能效优势
Abstract
ang , Student Member , IEEE, Rhesa Nathanael , Student Member , IEEE, Hossein Fariborzi, Student Member , IEEE, Abhinav Gupta, Hei Kam , Member , IEEE, Vincent Pott , Member , IEEE, Jaeseok Jeon, Tsu-Jae King Liu , Fellow, IEEE, Dejan Markovic´, Member , IEEE, Elad Alon , Member , IEEE, and Vladimir Stojanovic´, Member , IEEE Abstract—This work presents measured results from test chips containing circuits implemented with micro-electro-mechanical (MEM) relays. The relay circuits designed on thes