▸创新点1:垂直MOSFET结构设计(方法创新),通过将MOSFET的源极和漏极垂直堆叠,显著减小了芯片面积并提高了功率密度,适用于高集成度功率器件。
▸创新点2:贯穿体通孔技术(工艺创新),在半导体体内形成垂直于表面的通孔,直接连接源极与栅极结构,降低了寄生电阻和电感,提升了开关速度和能效。
▸创新点3:源极与漏极的电耦合优化(电路创新),通过共平面设计和导电外壳短路连接,优化了电流路径分布,减少了导通损耗,同时增强了散热性能。
▸创新点4:双垂直MOSFET集成(系统创新),将两个垂直MOSFET以共平面方式集成在同一芯片上,实现了对称布局,降低了互连复杂度并提高了系统可靠性。
Abstract
rmining interest. The
full text and images can be obtained from the U.S. Patent Of fice at
http://www.uspto.gov.
7,910,992 March 22, 2011
Vertical MOSFET With Through-Body Via for Gate
Inventors: Ahmad Ashrafzadeh (Morgan Hill, CA)
Assignee: Maxim Integrated Products, Inc. (Sunnyvale, CA)
Filed: July 15, 2008.
Current US Class: 257/341; 257/330;
257/621;
257/E29.257;
257/E29.262
Current International Class: H01L 29/76 (20060101)
Field of Search: 257/341,330,621,
E29.257,E29.262
U.S. Patent Docume