JSSC 2012第7期Data Converters0.35μm

A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply S

本文提出了一种采用电荷平衡技术和静电阻尼的高分辨率加速度计，具有高线性度和低功耗特性。

0.35μm CMOS, 3.6V, 1mA, 1.3%非线性度, 2μg噪声底限, 200Hz带宽

加速度计电荷平衡静电阻尼高分辨率自平衡桥

▸采用混合接口拓扑实现高分辨率

▸利用静电阻尼降低高Q值传感器的稳定时间

▸集成自平衡桥（SBB）开环读出和AC力反馈

Abstract

In this paper, a charge-balancing acce lerometer is presented. A hybrid interface to pology is utilised to achieve high resolution, high linearity and low power supply sensitivity. The accelerometer consists of a micromechan ical sensor element, a self-balancing bridge (SBB) open -loop readout, AC force feedback and ADC. The SBB converts acceleration to ratiometric voltage. The ratiometric output of the SBB is converted to the digital domain by the ADC. In order to achieve high resolution, a mic