← 返回 JSSC 论文列表JSSC 2013第1期Power Management180-nm CMOS
A Temperature-to-Digital Converter for a MEMS-Based Programmable Oscillator With
提出一种基于MEMS的可编程振荡器，采用温度数字转换器实现高精度频率稳定性。
0.1-mK (rms)分辨率，5-Hz带宽，3.97 mA功耗，3.3V供电
MEMS振荡器温度数字转换器频率稳定性相位噪声CMOS
▸基于热敏电阻的温度数字转换器（TDC）
▸高分辨率可调参考电阻网络和分数分频技术
▸开关电阻测量方法和VCO量化器降低噪声
Abstract
MEMS-based oscillators offer a silicon-based alterna-
tive to quartz-based f requency references. Here, a MEMS-based
programmable oscillator is presented which achieves better than
0.5-ppm frequency stability from 40 Ct o8 5 Ca n dl e s st h a n
1-ps (rms) integra ted phase noise (12 kHz to 20 MHz). A key com-
ponent of this system is a thermistor-based temperature-to-digital
converter (TDC) which enables accurate and low noise compen-
sation of temper ature-induced variation of the MEMS resonan