← 返回 JSSC 论文列表JSSC 2013第5期MemoryFlash Memory
A Logic-Compatible Embedded Flash Memory for Zero-Standby Power System-on-Chips Featuring a Multi-Story High V oltage Switch and a Selective Refresh Scheme Seung-Hwan Song, Student Member , IEEE, Ki
一种基于标准逻辑工艺的嵌入式闪存,用于零待机功耗SoC
5nm隧道氧化物工艺
嵌入式闪存零待机功耗逻辑兼容非易失性存储SoC
▸创新点1:使用标准I/O器件实现嵌入式闪存(方法创新)。该技术通过仅使用标准核心和I/O晶体管,在通用逻辑工艺中实现嵌入式闪存,无需特殊器件,显著降低了制造成本和工艺复杂度,适用于5 nm隧道氧化层工艺。
▸创新点2:无过应力高压开关设计(电路创新)。采用创新的高压开关技术,避免了传统设计中常见的过应力问题,从而提高了单元的阈值电压窗口,增强了存储器的可靠性和耐久性。
▸创新点3:选择性字线刷新方案(系统创新)。通过选择性刷新字线,优化了存储器的功耗管理,显著提高了耐久性周期,适用于零待机功耗系统芯片(SoCs)的需求。
▸创新点4:逻辑兼容性设计(方法创新)。该嵌入式闪存完全兼容标准逻辑工艺,无需额外工艺步骤,为自适应自修复技术和零待机功耗系统提供了可行的非易失性存储解决方案。
Abstract
Embedded flash memory implemented usin gs t a n - dard I/O devices can open doors to new applications and system capabilities, as it can serve as a secure on-chip non-volatile storage for VLSI chips built in standard logic processe s. For example, it is indispensable for adaptive sel f-healing techniques targeted for mitigating process variation and c ircuit aging related issues where system information must be retained dur ing power down periods. Embedded non-volatile memory c an also enable zero-standby power systems by allowing them to completely power down without losing critical data. There h as been numerous device and circuit level research on high-density non-volatile memories such as flash, STT-MRAM, PRAM, and RRAM. However, only few attempts have been made to devel op a cost effective mod- erate-density non-volatile solution using standard I/O devices. In this paper, a logic-compatible embedded flash memory that uses no special devices other than standard core and I/O transistors is demonstrated in a generic logic process having a 5 nm tunnel oxide. An overstress-free high voltage switch and a selective WL refresh scheme are employed for improved cell threshold voltage window and higher endurance cycles.