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A 12-V 83-nJ CMOS Humidity Sensor for RFID Applications Zhichao Tan Student Memb
一款用于RFID应用的12V 83nJ CMOS湿度传感器，集成电容式湿度传感元件和高效电容数字转换器。
0.16μm CMOS, 1.2V, 12.5-bit分辨率, 0.8ms转换时间, 8.6μA电流
湿度传感器RFIDCMOS电容数字转换器ΔΣ调制器
▸CMOS兼容的电容式湿度传感器
▸基于三阶ΔΣ调制器的高效电容数字转换器
▸采用前馈环路滤波器拓扑以适应有限输出摆幅
Abstract
This paper presents a fully integrated CMOS hu-
midity sensor for a smart RFID sensor platform. The sensing
element is a CMOS-compatible cap acitive humidity sensor, which
consists of top-metal finger-structure electrodes covered by a
humidity-sensitive polyimide laye r. Its humidity-sensitive capac-
itance is digitized by an energy-ef ficient capacitance-to-digital
converter (CDC) based on a third- order delta-sigma modulator.
This CDC employs current-ef ficient operational transconductance
amplifi