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An Interface for Eddy-Current Displacement Sensors With 15-bit Resolution and 20
一种用于涡流位移传感器的15位分辨率、20MHz激励频率的集成接口设计。
0.35-µm BiCMOS, 3.3V, 18mW, 15.5-bit分辨率, 65nm精度(3mm量程), 1kHz带宽
涡流传感器位移测量高分辨率同步解调比例测量
▸采用20MHz高频激励减小涡流穿透深度
▸双通道同步解调器抵消偏移和1/f噪声
▸比例测量方法提升系统稳定性
Abstract
This paper presents an integrated interface for eddy-
current sensors (ECSs) for displacement measurement. The em-
ployed architecture helps bridging the performance gap between
the requirements of demanding an d precision industrial applica-
tions and the performance of existing ECS interfaces. The inter-
face operates with a sensor excitation frequency of 20 MHz, which
is more than one order of magnit ude higher than typical values.
This high excitation frequency lim its the eddy-current penet