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JSSC 2013第11期Digital Circuits32nm/22nmProcessor/CPU

Miniaturized BJT-Based Thermal Sensor for Microprocessors in 32- and 22-nm Techn

提出了一种用于微处理器的微型化基于BJT的温度传感器,具有高分辨率和快速响应能力。
±0.2°C分辨率, 0.02mm²@32nm/0.006mm²@22nm, 3.8/1.4mW功耗, 1.4V电源
温度传感器BJT微处理器工艺节点功耗优化
采用BJT电压与参考电压比较的频率转换技术
在32nm和22nm工艺节点下实现极小的面积
快速转换速率(2-20kS/s)捕捉CPU瞬态温度变化
Abstract
A thermal sensor is propos ed for microprocessors, which compares the BJT voltage to a reference by converting both voltages t of r e q u e n c ya n dd i v i d i n gt h ef r e q u e n c i e st or e s u l ti na digital number. The sensor has an rms resolution of ±0.2C and an area of 0.02 mm² at the 32-nm process node and 0.006 mm² at 22 nm, i ncluding all digital processing circuitry. The conversion rate is between 2–20 kS/s, which enables it to capture fast tran- sients on the CPU. It consumes 3