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JSSC 2014第2期Other130 nm

Large-Scale Sensing System Combining Large-Area Electronics and CMOS ICs for Structural-Health Monitoring Yingzhe Hu, Student Member , IEEE , Warren S. A. Rieutort-Louis ,S t u d e n tM e m b e r ,I E E E

结合大面积电子和CMOS IC的大规模传感系统,用于桥梁早期损伤检测。
灵敏度18 µStrain,读取能量270 nJ/测量,通信能量12.8 pJ/3.3 pJ每比特(Tx/Rx),距离7.5米
大规模传感系统大面积电子CMOS IC应变检测非接触接口
非接触式接口实现CMOS IC与大面积电子(LAE)的可扩展结合
采用薄型聚酰亚胺片集成薄膜应变计和晶体管
通过感应和电容天线实现低成本层压组装
Abstract
Early-stage damage detection for bridges requires continuously sensing strain over l arge portions of the structure, yet with centimeter-scale resol ution. T o achieve sensing on such a scale, this work presents a sensing sheet that combines CMOS ICs, for sensor control and readout, with large-area electronics (LAE), for many-channel distr ibuted sensing and data aggrega- tion. Bonded to a structure, the sheet thus enables strain sensing scalable to high spatial resolutions. In order to combine the two technologies in a correspondingly scalable manner, non-contact in- terfaces are used. Inductive and ca pacitive antennas are patterned on the LAE sheet and on the IC pac kages, so that system assembly is achieved via low-cost sheet lamination without metallurgical bonds. The LAE sheet integrates thin- film strain gauges, thin- film transistors, and long interconnects on a 50-µm-thick polyimide sheet, and the CMOS ICs integrate subsystems for sensor readout, control, and communication over the distributed sheet in a 130 nm process. Multi-channel strain readout is achieved with sensitivity of 18 µStrain at a readout energy of 270 nJ/measurement, while the communication energy is 12.8 pJ/3.3 pJ per bit (Tx/Rx) over a distance of 7.5 m.