A Monolithically Integrated Pressure/Oxygen/ Temperature Sensing SoC for Multimodality Intracranial Neuromonitoring Wai Pan Chan, Margarita Narducci, Y

Abstract

A fully integrated SoC for multimodality intracra- nial neuromonitoring is presented in this paper. Three sensors including a capacitive MEMS press ure sensor, an electrochemical oxygen sensor and a solid-state temperature sensor are integrated together in a single chip with their respective interface circuits. Chopper stabilization and dynam ic element matching techniques are applied in sensor interface circuits to reduce circuit noise and offset. On-chip calibration is implemented for each sensor to compensate process variation s. Measured sensitivity of the pressure, oxygen, and tempera ture sensors are 18.6 aF/mmHg, 194 pA/mmHg, and 2 mV/ C, respectively. Implemented in 0.18 m CMOS, the SoC occupies an area of 1.4 mm 4m ma n d consumes 166 W DC power. A prototype catheter for intracra- nial pressure (ICP) monitorin g has been implemented and the performance has been veri fied with ex vivo experiment.