JSSC 2015第1期Other0.18μm CMOS

3D Ultrasonic Range ﬁnder on a Chip

一种基于AlN MEMS换能器的3D超声波测距芯片，能在1米范围内精确定位目标。

0.5米距离下RMS位置误差：0.4毫米（距离轴），0.2度（x轴角度），0.8度（y轴角度）；功耗：400μW（1米范围，30fps），5μW（0.3米范围，10fps）

超声波测距MEMS换能器3D定位ASIC抗混叠滤波

▸使用AlN MEMS换能器阵列

▸定制读出电子电路

▸集成连续时间抗混叠滤波器的开关电容带通ADC

Abstract

An ultrasonic 3D range ﬁnder uses an array of AlN MEMS transducers and custom read out electronics to localize tar- gets over a ﬁeld of view up to 1 m away. The rms position error at 0.5 m range is 0.4 mm, 0.2 ,a n d0 . 8 for the range, x-angle, and y-angle axes, respectively. The 0.18 CMOS ASIC com- prises 10 independent channels with separate high voltage trans- mitters, readout ampliﬁers, and switched-capacitor bandpass ADCs with built-in continuous time anti-alias ﬁl t e r i n g .F o ra1m ma