JSSC 2015第1期Clocking & PLLs180nm CMOS

A 3 ppm 15 08 mm 2 10 µA 32768 kHz MEMS-Based Oscillator Samira Zaliasl Member

首款32kHz低功耗MEMS振荡器，用于替代晶体振荡器，适用于空间受限移动设备。

1.5×0.8 mm², 0.9 µA (XO), 1.0 µA (TCXO), ±3 ppm (TCXO), 1.4V-4.5V

MEMS振荡器低功耗温度补偿32kHz移动设备

▸首款32kHz低功耗MEMS振荡器

▸支持温度补偿校准（TCXO）

▸集成低功耗维持电路、分数N PLL、温度传感器和数字控制

Abstract

This paper describes the ﬁrst 32 kHz low-power MEMS-based oscillator in prod uction. The primary goal is to provide a small form-factor oscillator (1.5 × 0.8 mm 2)f o ru s ea s a crystal replacement in space-constrained mobile devices. The oscillator generates an output frequency of 32.768 kHz and its binary divisors down to 1 Hz. The frequency stability over the industrial temperature range (–40 °C to 85 °C) is ±100 ppm as an oscillator (XO) or ±3 ppm with optional calibration as a tempera- tur