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A 053-THz Subharmonic Injection-Locked Phased Array With 63-uW Radiated Power in
0.53-THz次谐波注入锁定相控阵，采用ILO链补偿相位误差，实现60°波束扫描。
529-534GHz输出频率，-12dBm辐射功率，0.24‰ DC-to-THz效率，260mW功耗
太赫兹次谐波注入锁定相控阵波束成形CMOS
▸ILO链补偿相位误差且不引入功率变化
▸六级三重推振荡器改善信号平衡和输出功率
▸无硅透镜、石英基板或衬底减薄条件下实现高效辐射
Abstract
This paper presents a 0.53-THz subharmonic
injection-locked 1 × 4 phased array based on an injection-locked
oscillator (ILO) chain. Thanks to the ILO chain, the phase errors
in the phased array can be compensated without introducing
power variation. This technique enables accurate beam steering
with a 60
◦ scan range in the E-plane at 0.53 THz. A six-
stage triple-push oscillator is proposed to generate the signal at
0.53 THz. Compared with a conventional triple-push oscillator,
it reduces layou