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A 141-uW High-Voltage MEMS Gyroscope Drive Interface Circuit Based on Flying Cap
基于飞电容的141微瓦高压MEMS陀螺仪驱动接口电路
141 µW, 0.58 mm²
MEMS陀螺仪高压驱动飞电容低功耗接口电路
▸创新点1：利用飞电容高效叠加高压直流偏置（电路创新）：通过预充电的飞电容技术，将高压直流偏置与低电压时变信号高效叠加，显著降低了高压信号生成所需的功耗，同时保持了信号的完整性。
▸创新点2：低电压域生成时变信号（方法创新）：在低电压域生成时变信号，避免了传统高压信号生成的高功耗问题，结合高压直流偏置，实现了低功耗和高性能的平衡。
▸创新点3：闭环低纹波电荷泵设计（电路创新）：采用闭环低纹波电荷泵设计，有效减少了电压波动，提高了系统的稳定性和效率，确保了高压偏置的精确控制。
▸创新点4：全芯片集成与面积优化（系统创新）：实现了全芯片集成，电路面积仅为0.58 mm²，同时将功耗降低至141 µW，显著提升了系统的紧凑性和能效比。
Abstract
Electronic readout circuits for microelectromechan-
ical gyroscopes suffer from high power consumption caused by
the electrostatic sensor actuation with signals above the standard
chip supply voltage. This paper presents an electronic circuit
principle and implementation, which exploits the fact that ac
actuation signals in the range of the chip supply voltage are
sufficient, if they are combined with a high-voltage (HV) dc
biasing. Therefore, the developed system performs the generation
of the t