← 返回 JSSC 论文列表JSSC 2019第10期Power Management0.18μmNeural Network Accelerator
A 292-μW Capacitance-to-Digital Converter With Differential Bondwire Acceleromet
一种低功耗电容数字转换器，支持气压、湿度和加速度传感器。
0.18μm CMOS, 1.1V, 292μW, 864aF分辨率
电容数字转换器键合线加速度计双量化架构CMOS传感器低功耗设计
▸利用键合线差分结构实现加速度检测
▸采用双量化架构（ΣΔ调制器与SAR ADC结合）
▸在标准CMOS工艺中集成多传感器前端
Abstract
This paper presents a sensor front end for air
pressure sensor, relative humidity (RH) sensor, and accelerometer
in a standard CMOS process, equipped with a wide input range
high-resolution capacitance-to-digital converter (CDC). For air
pressure and RH, interdigitated top metals in air and polyimide
are exploited, respectively, which exhibit the change in dielectric
constant. For acceleration, separation among three bondwires is
exploited. These sensing trans ducers induce capacitance change
th