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JSSC 2019第11期Image Sensors

A CMOS Electrochemical Biochip With 32 32 Three-Electrode V oltammetry Pixels

一款集成32×32三电极伏安法像素的CMOS电化学生物芯片,用于高性能分子检测。
280 fA rms输入参考噪声(0.1-20 Hz带宽),93 dB动态范围
CMOS电化学生物芯片伏安法DNA检测温度控制
32×32三电极伏安法像素阵列
片上温度控制(25-95°C)
低噪声(280 fA rms)和高动态范围(93 dB)的电流检测电路
Abstract
A CMOS-integrated electrochemical biochip for high-performance molecular testing is presented. The system includes an array of 32 × 32 three-electrode voltammetry pix- els and on-chip temperature control between 25 and 95 ◦C. Each 100 μm × 100 μm pixel includes a CMOS-compatible and chemo-stable amorphous carbon electrode transducer connected to in-pixel  current detection circuitry with 280 fA rms input-referred noise (0.1–20 Hz bandwidth) and 93 dB dynamic range (DR). Array-based DNA detecti