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JSSC 2019第11期Power Management45/65nm

A Modular Direct Time-of-Flight Depth Sensor in 4565-nm 3-D-Stacked CMOS Technol

介绍了一种模块化直接飞行时间深度传感器,采用3D堆叠CMOS技术,具有高精度和远距离测量能力。
低分辨率模式:300米最大范围,80厘米精度;高分辨率模式:150米最大范围,7厘米精度;28dB干扰抑制
飞行时间深度传感器SPAD3D堆叠CMOSLiDAR
模块化设计,每个模块自主操作
采用3D堆叠CMOS技术,背照式SPAD探测器
脉冲位置调制激光签名,减少干扰
Abstract
This article introduces a modular, direct time-of- flight (TOF) depth sensor. Each module is digitally synthesized and features a 2 × (8 × 8) single-photon avalanche diode (SPAD) pixel array, an edge-sensitive decision tree, a shared time-to- digital converter (TDC), 21-bit per-pixel memory, and in-locus data processing. Each module operates autonomously, by internal data acquisition, management, and storage, being periodically read out by an external access. The prototype was fabricated in a TSM