JSSC 2020第8期Other0.18µm

A 2-in-1 Temperature and Humidity Sensor With a Single FLL Wheatstone-Bridge Fro

提出了一种基于FLL的温湿度传感器，采用单一模拟前端实现高线性度检测

0.18µm CMOS, 15.6µW, 2mK温度分辨率, 0.0073%RH湿度分辨率

温湿度传感器频率锁定环惠斯通电桥CMOS时间数字转换器

▸采用频率锁定环（FLL）实现高线性度温湿度检测

▸提出不完全稳定的开关电容式惠斯通电桥结构

▸集成电阻和电容传感器于单一模拟前端

Abstract

This article presents a CMOS 2-in-1 relative humid- ity (RH) and temperature (Temp) sensor. A single analog front-end (AFE) interfaces two on-chip transducers and con- verts the resistance ( ∝ Temp) and capacitance ( ∝ RH) into a time-based signal. This conversion occurs with high linearity (±10 ppm error) across the industrial temperature range ( −40 to +85 ◦C) through a frequency-locked loop (FLL). An incomplete- settling, switched-capacitor-based Wheatstone bridge is proposed to sense the R a