← 返回 JSSC 论文列表JSSC 2020第9期Other0.13-µm CMOS, 0.35-µm CMOS
A 22-ngHz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass S
开发了一种噪声极低（22 ng/√Hz）且功耗适中（17 mW）的全集成MEMS加速度计，适用于基础设施监测和油气勘探等新兴应用。
22 ng/√Hz噪声, 17 mW功耗, ±0.55 g输入范围, 400 Hz带宽
MEMS加速度计低噪声低功耗数字域处理油气勘探
▸创新点1：采用检测与控制并发操作技术，通过独特的MEMS元件实现，显著提升了系统响应速度和效率，同时降低了功耗。
▸创新点2：减少伺服信号泄漏和噪声，通过优化电路设计和信号处理算法，有效降低了1-bit量化与质量不对称变形引起的噪声，使噪声水平降低了九倍。
▸创新点3：数字域处理质量不对称变形，采用先进的数字信号处理技术，解决了传统模拟方法难以处理的质量不对称问题，提高了测量精度和稳定性。
▸创新点4：采用6英寸Si/SOI/Si键合晶圆制造MEMS元件，结合标准0.13-µm CMOS和高电压0.35-µm CMOS工艺，实现了高性能与低成本的集成，适用于多种新兴应用场景。
Abstract
A fully integrated micro-electromechanical sys-
tem (MEMS) accelerometer with extremely low noise level
(22 ng/ √ Hz) and sufficiently low po wer consumption (17 mW)
for emerging applications (such as infrastructure monitoring
and next-generation oil and gas exploration) was developed.
By applying concurrent operations of detection and control
(enabled by a unique MEMS element) and reducing servo-signal
leakage and noise caused by an interaction of 1-bit quantiza-
tion and asymmetric mass deforma