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JSSC 2020第11期Other180nm

An Auto-Calibrated Resistive Measurement System With Low Noise Instrumentation ASIC

一种用于宽范围电阻传感器的自校准低噪声测量系统
可检测72 ppm的ΔR/Rs变化,相对误差小于±1%
电阻传感器自校准低噪声仪表放大器电流生成器
创新点1:四相位自校准差分和比率测量操作(方法创新)。通过四相位自动校准技术有效补偿传感器基线电阻和非理想电路参数导致的失配,显著提升测量精度,相对误差小于±1%。
创新点2:低噪声专用电流生成器(电路创新)。采用定制化设计在UMC 180nm工艺中实现,为系统提供高稳定性激励电流,支持高达0.5MΩ基阻下72ppm级ΔR/Rs微小变化检测。
创新点3:高CMRR电流模式仪表放大器(电路创新)。通过电流模式架构结合高共模抑制比(CMRR)设计,有效抑制共模干扰,提升微弱信号检测能力,适配宽范围电阻传感器。
创新点4:寄生电容影响实验验证(系统创新)。通过实测分析寄生电容对传感器响应的影响,为实际应用中的系统稳定性优化提供实证依据。
Abstract
Most of the resistive sensors have a large baseline resistor and a relatively small incremental change in the resis- tor value due to the measurand. A half-bridge-based versatile R/R s measurement system for a wide range of resistive sensors is reported in this article. A four-phase auto-calibration-based differential and ratiometric operation is used to compensate for the baseline resistance of the sensor and the mismatches due to the non-ideal circuit parameters. A low-noise application-specific current generator and low noise, high CMRR current-mode instrumentation amplifier is designed and fabricated in UMC 180-nm technology. A prototype board of the R/R s measure- ment system is developed and tested. The experimental results show that the proposed system is able to detect even smaller ppm level of about 72 ppm of R/R s for the base resistor Rs value as high as 0.5 M  with a relative error of less than ±1%. The effect of the parasitic capacitors on the sensor response is also tested experimentally. Finally, the proposed system is tested with an in-house fabricated displacement sensor.