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I Introduction
毫米级CMOS 64×64单电荷粒子辐射探测器系统，用于外部束癌症放射治疗。
TSMC 65nm LP CMOS, 1.2V, 0.535mW静态功耗
CMOS辐射探测器放射治疗单电荷粒子检测体内剂量测定
▸采用1×1 µm²二极管测量单电荷粒子在耗尽区的能量沉积
▸通过测量脉冲宽度而非电压降，避免使用高功耗ADC
▸首次展示用于植入式体内剂量测定的单电荷粒子检测
Abstract
l
M. Maharbiz, and Mekhail Anwar
Abstract—This paper presents a millimeter-scale CMOS 64×64
single charged particle radiation detector system for external
beam cancer radiotherapy. A 1 ×1 µm2 diode measures energy
deposition by a single charged particle in the depletion region,
and the array design provides a large detection area of 512 ×512
µm2. Instead of sensing the voltage drop caused by radiation, the
proposed system measures the pulse width, i.e., the time it takes
for the voltage to retur