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JSSC 2020第11期Image Sensors90nm背照式CMOSCMOS Image Sensor

Indirect Time-of-Flight CMOS Image Sensor With On-Chip Background Light Cancelli

提出一种带背景光消除和运动伪影抑制的间接飞行时间CMOS图像传感器。
320×240分辨率,100MHz调制频率,0.54%深度误差(0.75-4m),120klx背景光下0.55%误差
间接飞行时间CMOS图像传感器背景光消除运动伪影抑制混合深度成像
背照式三叉戟钉扎光电二极管增强电荷传输
伪四抽头解调方法抑制运动伪影
混合深度成像结合两种解调方案优势
Abstract
This article presents a 320 × 240 indirect time-of- flight (iToF) CMOS image sensor (CIS) with on-chip motion arti- fact suppression and background light cancelling (BGLC). The proposed iToF CIS uses a backside-illuminated trident pinned photodiode (PPD) that assists charge transfer with a built-in lateral electric field for enhanced depth accuracy. To overcome the limitation of the conventional iToF CIS that exhibits motion artifact, we propose a pseudo-four-tap (P4-tap) demodulation method with