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JSSC 2021第1期Clocking & PLLs第二代10nm级DRAM工艺DRAM

A 16-GB 640-GB/s HBM2E DRAM With a Data-Bus Window Extension Technique and a Synergetic On-Die ECC Scheme Ki Chul Chun , Y ong Ki Kim, Y esin Ryu, Jaewon Park, Chi Sung Oh, Y oung Y ong Byun, So Y oung Kim, Dong Hak Shin, Jun Gyu Lee, Byung-Kyu Ho, Min-Sang Park, Seong-Jin Cho, Seunghan Woo, Byoung Mo Moon, Beomyong Kil, Sungoh Ahn, Jae Hoon Lee, Soo Y oung Kim, Seouk-Kyu Choi, Jae-Seung Jeong, Sung-Gi Ahn, Jihye Kim, Jun

介绍了一种16GB 640GB/s的HBM2E DRAM,采用数据总线窗口扩展技术和同步设计,提升性能和可靠性。
16GB容量,640GB/s带宽,5Gb/s/引脚,105°C高温稳定运行
HBM2EDRAM数据总线扩展片上ECC高带宽
创新点1:数据总线窗口扩展技术(系统创新) - 通过优化数据路径架构、硅通孔(TSV)布局及TSV-PHY对齐,有效应对时钟周期缩短的挑战,显著提升数据传输稳定性,支持5 Gb/s/pin的高速传输。
创新点2:电源TSV布局优化(电路创新) - 在阵列中央和芯片边缘部署电源TSV,并结合专用顶层金属电源网格设计,将电源IR压降降低62%,显著改善供电稳定性。
创新点3:片上ECC与自清洁功能(系统创新) - 采用与系统ECC正交的OD-ECC方案,结合自清洁功能,将不可纠正误码率(UBER)提升10^5倍,大幅增强数据可靠性。
创新点4:并行位MBIST测试技术(方法创新) - 支持低频单元/核心并行测试及全通道可调参数高速操作,测试时间减少66%,显著提升测试效率。
Abstract
Circuit and design techniques are presented for enhancing the performance and reliability of a 3-D-stacked high bandwidth memory-2 extension (HBM2E). A data-bus window extension technique is implemented to cope with reduced clock cycle time ranging from data-path architecture, through-silicon via (TSV) placement, and TSV-PHY alignment. A power TSV placement in the middle of array and at the chip edge along with a dedicated top metal for power mesh improves power IR drop by 62%. An on-die ECC (OD-ECC) scheme featuring a self- scrubbing function is designed to be orthogonal to system ECC. An uncorrectable bit error rate (UBER) is improved by 10 5 times with the proposed OD-ECC and scrubbing scheme. A memory built-in self-test (MBIST) block supports low-frequency cell and core test in a parallel manner and all channel at-speed operation with adjustable ac parameters. The proposed parallel-bit MBIST reduces test time by 66%. A 16-GB HBM2E fabricated in the second generation of 10-nm class DRAM process achieves a bandwidth up to 640 GB/s (5 Gb/s/pin) and provides a stable bit-cell operation at a high temperature (e.g., 105 ◦ C).