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JSSC 2021第2期Data Converters180nmDelta-Sigma ADC

A1 0f J K2 Wheatstone Bridge Temperature Sensor With a Tail-Resistor-Linearized

一种采用尾电阻线性化技术的高能效惠斯通电桥温度传感器,具有高灵敏度和低功耗。
180nm CMOS, 1.8V, 55μW, 150μK rms分辨率, ±0.1°C精度
惠斯通电桥温度传感器尾电阻线性化ΔΣ调制器能效优化
使用正负温度系数电阻构建惠斯通电桥以提高灵敏度
采用尾电阻线性化技术抑制量化噪声折叠
通过相同单元元件实现电桥和DAC以提高精度
Abstract
This article describes a highly energy-efficient Wheatstone bridge temperature se nsor. To maximize sensitivity, the bridge is made from resistors with positive (silicided diffusion) and negative (poly) temperature coefficients. The bridge is bal- anced by a resistive (poly) FIR-DAC, which is part of a 2nd-order continuous-time delta-sigma modulator (CT M). Each stage of the modulator is based on an energy-efficient current-reuse OTA. To efficiently suppress quantization noise foldback, the 1st st