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JSSC 2021第3期Other65nm

High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detect

基于氮空位中心的CMOS量子磁强计,实现高灵敏度和小型化
灵敏度245 nT/Hz^1/2,尺寸1.5 mm²
量子磁强计氮空位中心CMOS集成光学检测磁共振光谱滤波
集成自旋控制和读出关键组件
采用大面积电流驱动线阵列实现均匀微波场
CMOS集成光谱滤波器高效抑制泵浦光
Abstract
Magnetometers based on quantum mechanical processes enable high sensitivity and long-term stability without the need for re-calibration, but their integration into fieldable devices remains challenging. This article presents a CMOS quan- tum vector-field magnetometer that miniaturizes the conventional quantum sensing platforms using nitrogen-vacancy (NV) centers in diamond. By integrating key components for spin control and readout, the chip performs magnetometry through optically detected magneti