Direct TOF Scanning LiDAR Sensor With Two-Step Multievent Histogramming TDC and Embedded Interference Filter Hyeongseok Seo , Student Member , IEEE, Heesun Y oon, Dongkyu Kim, Jungwoo Kim

Abstract

This article presents a 36-channel scanning light detection and ranging (LiDAR) sensor with an on-chip single- photon avalanche diode array. The sensor has an area-efficient 11-bit in situ histogramming time-to-digital converter with a 3000 × 78 µm 2 per channel area based on a mixed-signal accumulator, though it is incorporated with histogramming and filtering capabilities. Furthermore, owing to its embedded interference (IF) filter, the sensor can perform reliable direct time-of-flight measurements even with IF from 32 different LiDAR sensors. The LiDAR system also has a beam scanner that comprises dual laser diodes for IF elimination and a hybrid mirror such that high-resolution images with a resolution of 2200× 36 can be acquired with a wide field-of-view of 120 ◦ × 8◦.