JSSC 2021第11期Image Sensors65nmCMOS Image Sensor

A 12-Mpixel Indirect Time-of-Flight Image Sensor With 4-Tap 35- μm Pixels for Pe

一款1.2百万像素间接飞行时间图像传感器，采用4抽头3.5微米像素设计，降低峰值电流并消除多用户干扰。

1.2-Mpixel, 4-tap 3.5-μm pixels, QE 38% at 940 nm, DC 96% at 100 MHz, depth noise <0.92%

间接飞行时间CMOS图像传感器解调像素多用户干扰消除量子效率

▸创新点1：4抽头3.5微米解调像素设计，通过优化像素结构提高量子效率（QE）至38%和解调对比度（DC）至96%/80%（100/200MHz），属于像素级电路创新

▸创新点2：多交织方案通过时序优化降低峰值电流至0.9A以下，同时消除固定模式相位噪声（FPPN）且保持解调对比度稳定，属于系统架构创新

▸创新点3：基于伪随机调制的多用户干扰消除（MUIC）方案，可有效抑制至少两个相邻ToF传感器的信号干扰，属于信号处理算法创新

▸创新点4：采用65nm双die堆叠工艺实现1.2M像素传感器，在full模式和2×2 binning模式下分别实现<0.92%和<0.3%的深度噪声，属于工艺集成创新

Abstract

A 1.2-Mpixel indirect time-of-ﬂight (ToF) CMOS image sensor is presented to lower peak current and to can- cel out multi-user interference. The proposed 4-tap 3.5- µm demodulation pixel is optimally designed to improve quan- tum efﬁciency (QE) and demodulation contrast (DC). A new “multiple-interleaving” scheme is proposed to reduce the peak current and self-compensate ﬁxed-pattern phase noise (FPPN) with the minimal side effect of DC imbalance. To cancel out interference from the other ToF sens