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A Self-Calibrated Hybrid Thermal-DiffusivityResistor-Based Temperature Sensor
提出一种混合温度传感器，通过热扩散传感器校准电阻传感器，降低成本并提高精度。
180nm CMOS, 1.8V, 66μW, 0.25°C inaccuracy
混合温度传感器热扩散传感器电阻传感器自校准CMOS
▸创新点1：系统创新 - 提出了一种混合温度传感器架构，结合了高精度但低能效的热扩散传感器与低精度但高能效的电阻传感器，通过前者校准后者，实现了在-55°C至125°C范围内0.25°C的高精度测量。
▸创新点2：电路创新 - 复用Wien-bridge滤波器的读出电路用于热扩散传感器，显著减少了芯片面积（仅0.2 mm²），解决了传统分立设计带来的面积开销问题。
▸创新点3：方法创新 - 利用片上热扩散传感器进行自校准，无需外部温度参考或温控环境，降低了系统复杂性和成本，同时支持宽温区操作。
▸创新点4：性能创新 - 实现了450 μKrms分辨率（10ms转换时间）和0.13 pJ·K²的FoM，且1/f噪声角频率低于10mHz，媲美BJT传感器性能。
Abstract
This article describes a hybrid temperature sensor
in which an accurate, but energy-inefficient, thermal diffusiv-
ity (TD) sensor is used to calibrate an inaccurate, but efficient,
resistor-based sensor. The latter is based on silicided polysilicon
resistors embedded in a Wien-bridge (WB) filter, while the
former is based on an electrothermal filter (ETF) made from a
p-diffusion/metal thermopile and an n-diffusion heater. The use of
an on-chip sensor for calibration obviates the need for an externa