← 返回 JSSC 论文列表JSSC 2021第12期Data Converters0.11μm CMOSSAR ADC
Energy-Efficient CMOS Humidity Sensors Using Adaptive Range-Shift Zoom CDC and Po
提出一种基于自适应范围缩放CDC的能效CMOS湿度传感器，采用SAR ADC和ΔΣ调制器组合结构。
17.9aF电容分辨率，14.0位ENOB，1.01ms转换时间，1.5μW功耗，±1.5%RH精度
CMOS湿度传感器电容数字转换器自适应范围缩放能效设计SAR ADC
▸自适应范围缩放(ARS) zoom CDC结构
▸功耗感知浮动反相放大器(FIA)阵列
▸抗片外寄生和干扰设计
Abstract
This article presents an adaptive zoom-capacitance-
to-digital converter (CDC)-based CMOS humidity sensor. The
humidity sensor is realized by means of two differential capac-
itors whose dielectrics are sensitive to humidity. The sensing
capacitors are interfaced with a zoom CDC, which consists
of a successive-approximation-register (SAR) analog-to-digital
converter (ADC) and a 3rd-order delta–sigma modulator (M).
The SAR ADC eliminates the influence of the baseline capaci-
tance to reduce the