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A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing A
一种基于MEMS科里奥利效应的低流量数字转换器，适用于液体和气体。
0.18-μm CMOS, 1.8V, 13mW, 80μg/h/√Hz噪声基底, ±0.31mg/h零稳定性
MEMS科里奥利质量流量传感器数字转换器相位锁定环背景灵敏度调谐
▸采用PLL驱动传感器共振频率
▸低1/f噪声SC-PI控制器维持恒定驱动幅度
▸背景灵敏度调谐(BST)方案确保宽密度范围内恒定灵敏度
Abstract
This article presents a microelectromechanical
system (MEMS) Coriolis-based mass-flow-to-digital converter
(DC) that can be used with both liquids and gases. It consists
of a micromachined Coriolis mass flow sensor and a CMOS
interface circuit that drives it into oscillation and digitizes the
resulting mass flow information. A phase-locked loop (PLL)
drives the sensor at its resonance frequency ( f
D), while a low
1/ f noise switched-capacitor (SC) proportional–integral (PI)
controller maintains a