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A 05-ms 475-nJ Resistor-to-Digital Converter for Resistive BTEX Sensor Achieving
一种用于BTEX气体检测的高能效电阻-数字转换器
110nm CMOS, 1.5V, 0.5ms测量时间, 95μW功耗
电阻-数字转换器BTEX传感器微机电系统能效优化气体检测
▸结合传感器偏置电路与RDC的首个积分器
▸采用16级反馈电阻数模转换器(RDAC)实现电荷平衡
▸通过微加热器不同加热水平实现单一传感器多气体检测
Abstract
This article presents an energy-efficient resistor-
to-digital converter (RDC) intended for use in a gas sensor
system to detect harmful benzene, toluene, ethyl-benzene, and
xylene (BTEX) compounds. The sensor is based on a resistive
micro-electromechanical systems (MEMS) sensor, whose selectiv-
ity is tuned by different heating levels of micro-heater, allowing
a single sensor to detect multiple gases. To achieve both high
resolution and energy efficiency, the sensor’s output current is
digitized