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CMOS SPAD Line Sensor With Fine-Tunable Parallel Connected Time-to-Digital Converters for Raman Spectroscopy Tuomo Talala
一款用于时间分辨拉曼光谱的256通道CMOS SPAD线传感器，具有可调时间分辨率和实时暗计数测量能力。
25.6–65 ps可调时间分辨率，3.2–8.2 ns动态范围，43.7 ps中值时间偏移，680 kHz最大激发脉冲率
CMOSSPAD时间数字转换器拉曼光谱暗计数测量
▸创新点1：256通道并行连接时间数字转换器（TDC）的系统创新，通过并行架构实现高吞吐量，支持256个SPAD通道同时工作，显著提升时间分辨拉曼光谱的测量效率。
▸创新点2：ps级可调时间分辨率的电路创新，TDC的时间分辨率可在25.6–65 ps范围内精细调节，动态范围为3.2–8.2 ns，适应不同时间分辨率的测量需求。
▸创新点3：实时暗计数测量的方法创新，每个激发脉冲进行两次暗计数测量，无需增加测量时间即可实现精确的暗计数补偿，最高支持680 kHz的激发脉冲频率。
▸创新点4：ps级时间偏差补偿的电路创新，通过精细调节TDC的bin边界，实现43.7 ps的通道间时间偏差中值，显著提升多通道时间测量的一致性。
Abstract
A 256-channel single-photon avalanche diode (SPAD) line sensor was designed for time-resolved Raman spec- troscopy in 110-nm CMOS technology. The line sensor consists of an 8 × 256 SPAD array and 256 parallel connected time-to- digital converters (TDCs). The adjustable temporal resolution and dynamic range of TDCs are 25.6–65 ps and 3.2–8.2 ns, respectively. The median timing skew along 256 channels is 43.7 ps, and TDC bin boundaries can be fine-tuned at the ps-level to enable precise timing skew compensation. The sensor is capable of real-time dark count measurement (two dark measurements for each excitation pulse) that gives accurate data for dark count compensation without any increment in measurement time. The maximum excitation pulse rate with real- time dark count measurement is 680 kHz. Raman spectra of six different samples were measured to prove the performance of the sensor in time-resolved Raman spectroscopy.