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JSSC 2023第9期Clocking & PLLs90nm SiGe BiCMOS

A 0.4-4 THz p-i-n Diode Frequency Multiplier in 90-nm SiGe BiCMOS

90nm SiGe BiCMOS工艺下实现的0.4-4 THz p-i-n二极管倍频器,具有高谐波辐射能力。
0.39 THz时EIRP 13 dBm,0.78 THz时EIRP -3.8 dBm,最高测至4.03 THz
太赫兹倍频器p-i-n二极管谐波辐射SiGe BiCMOS
利用p-i-n二极管反向恢复效应实现高非线性谐波生成
采用折叠偶极子天线辐射THz信号
演示无线谐波注入锁定技术实现外部源同步
Abstract
This article introduces a silicon-based source that can radiate power from the lower end of the terahertz (THz) spectrum into the far-infrared region. The radiator consists of a millimeter-wave (mm-wave) oscillator that drives a PIN diode multiplier. The p-i-n diodes exhibit reverse recovery when driven strongly, and the diode switches a large amount of current in a short interval. This process is highly non-linear and generates a harmonic-rich waveform, which is utilized here for higher harmonic generation. An on-chip folded dipole antenna is used to radiate the generated THz signal. The harmonic radiation properties of the folded dipole are analyzed and presented here. Wireless harmonic injection locking is also demonstrated in this work in order to synchronize the chip to an external source. Designed in GlobalFoundries 90-nm SiGe BiCMOS process, the chip has an effective isotropic radiated power (EIRP) of 13 dBm and −14.2-dBm radiated power at 0.39 THz. The chip is characterized up to 0.8 THz using Virginia Diodes (VDI) mixers, and an EIRP of −3.8 dBm is measured at 0.78 THz. In order to measure the radiated tones at higher frequencies, Fourier-transform infrared (FTIR) spectroscopy is used with a room-temperature deuterated triglycine sulfate (DTGS) detector. Measurement results confirm the presence of tones extending from the THz region into the far-infrared region, with an SNR of 18.4, 14, 9.3, and 6.7 dB at 1.17, 2.21, 3.25, and 4.03 THz, respectively. This work is the