JSSC 2023第11期Data Converters65nm

An EMG Interface Comprising a Flexible a-IGZO Active Electrode Matrix and a 65-n

提出一种基于柔性a-IGZO薄膜晶体管技术的4×4主动电极矩阵，用于监测肌肉收缩。

65nm CMOS, 1.2V, 20-dB in-band gain, 23-dB dc rejection

柔性电极a-IGZO薄膜晶体管EMGCMOS

▸创新点1：采用柔性a-IGZO薄膜晶体管技术实现高分辨率电极矩阵，在4×4 mm面积内集成电极和前端电路，支持毫米级精度的肌电信号测量，同时保持低功耗（5 mW）和高信噪比（55-µV rms输入参考噪声）。

▸创新点2：通过频率复用和电流域转换技术，将多通道信号通过单一输出传输至65-nm CMOS芯片，显著减少互连数量和硅面积占用，同时实现26V柔性电子与1.2V CMOS IC的高效接口兼容。

▸创新点3：集成开关电容高通滤波器于a-IGZO前端，提供25–40-MΩ阻抗和20-dB带内增益，其工艺和温度不敏感性增强了信号稳定性，并实现23-dB直流抑制，优化了生物信号采集质量。

▸创新点4：后端Si-IC采用偏移补偿跨阻放大器（TIA），具备50-dB直流抑制和可忽略的噪声贡献，可动态补偿柔性前端产生的可变偏置电流和偏移，提升系统整体精度和可靠性。

Abstract

In this work, a 4 × 4 active electrode (AE) matrix integrated on a flexible foil substrate to monitor muscular contraction is presented. The electrodes and their front ends (FEs) (i.e., AEs) are implemented on foil in amorphous indium gallium zinc oxide (a-IGZO) thin-film transistor (TFT) technol- ogy and interfaced with a custom 65-nm CMOS chip where analog-to-digital conversion and serial transmission of data from multiple channels are performed. On-foil frequency multiplexing and conversion t