JSSC 2024第2期Analog Circuits180nm CMOS

A 466 µgHz Single-Chip Accelerometer Exploiting a DTC-Assisted Chopper Amplifier

一款采用DTC辅助斩波放大器的单芯片加速度计，实现超低噪声和偏置不稳定性。

46.6 µg/√Hz热噪声, 472 µg偏置不稳定性, >1000 g满量程

单芯片加速度计斩波放大器数字时间转换器热噪声偏置不稳定性

▸采用粗数字时间转换器（CDTC）辅助斩波放大器抑制增益退化

▸采用细数字时间转换器（FDTC）辅助解调时钟偏斜补偿技术降低闪烁噪声

▸完全单芯片集成MEMS传感器、读出电路和环境传感器

Abstract

This article presents a single-chip accelerome- ter with the best reported thermal noise and the low- est bias instability among state-of-the-art accelerometers with high-g (>1000 g) sensing capability. Complete single-chip integration of microelectromechanical transducers, readout cir- cuits, and environmental sensors is achieved by leveraging a CMOS-microelectromechanical systems (MEMS) approach. Simple equations are derived to estimate the gain degradation issue due to delay mismatch in chopp