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A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With 6 ms Linear Range W
提出一种功耗低于5mW的CMOS-MEMS单片集成热流传感器SoC，具有高灵敏度和宽线性范围。
156mV/(m/s)灵敏度，±11m/s检测范围，±6m/s线性范围，86μm/s检测限，<5mW功耗
CMOS-MEMS热流传感器单片集成恒温差控制低噪声放大器
▸采用双对热敏电阻的MEMS传感器设计，优化微加热器与热敏电阻间距以实现宽线性范围
▸设计精确恒温差控制电路，温差偏差小于0.01K
▸采用电流反馈仪表放大器实现12.4nV/rtHz的低噪声性能
Abstract
This article presents a complementary metal-oxide
semiconductor (CMOS)-microelectromechanical system (MEMS)
monolithic integrated thermal flow sensor system, which consists
of a MEMS sensor with dual pairs of thermistors, a precise
constant temperature difference (CTD) control circuit, and a
low-noise readout circuit with a current feedback instrument
amplifier (CFIA). The MEMS sensor is fabricated using an
in-house developed post-CMOS process, while its sensing struc-
ture is thinned to 2.52 µm