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A 22-dBA Digital Optical MEMS Microphone Niccolò de Milleri
本文提出了一种结合MEMS技术和创新光学传感技术的数字光学麦克风，显著降低了系统固有噪声并提高了信噪比。
SNR 71.6 dBA, 输出灵敏度 -21 dBFS/Pa, 封装尺寸 5 × 5 × 2 mm³
MEMS麦克风光学传感信噪比系统级封装ASIC设计
▸创新点1：方法创新——结合MEMS技术和光学传感技术，提出了一种新型的声学信号转换机制，通过光学方式检测声波引起的微机械结构位移，实现了高精度声学传感。
▸创新点2：电路创新——设计了专用的应用指定集成电路（ASIC），优化了信号处理流程，显著降低了系统固有噪声，使得信噪比（SNR）达到71.6 dBA，远超传统MEMS麦克风。
▸创新点3：系统创新——开发了系统级封装（SiP）技术，将MEMS传感器、光学组件和ASIC集成在一个5×5×2 mm³的紧凑封装中，实现了高集成度和小型化，适用于多种便携式设备。
▸创新点4：性能创新——通过优化光学堆栈结构，提高了输出灵敏度至-21 dBFS/Pa，使得麦克风在低音量环境下仍能保持高灵敏度和低噪声性能。
Abstract
The market and the applications of
micro-electromechanical systems (MEMS)-based microphones
have been in continuous growth over the last decades. This
article presents a promising acoustic-sensing technology that
mixes the consolidated MEMS technology with an innovative
optical transduction technique of acoustic signals. The proposed
method allows to significantly reduce the intrinsic noise of
the system and to increase its signal-to-noise ratio (SNR). The
designed digital optical microphone rea