← 返回 JSSC 论文列表JSSC 2025第3期Power Management110nm CMOS
A 05-ms 475-nJ Resistor-to-Digital Converter for Resistive BTEX Sensor Achieving
一种用于BTEX气体检测的高能效电阻-数字转换器，实现0.5ms测量时间和47.5nJ能耗。
18.8-bit分辨率，20kΩ-500kΩ量程，0.5ms测量时间，95μW@1.5V
电阻-数字转换器BTEX传感器ΔΣ调制微机电系统能效优化
▸结合传感器偏置电路和RDC第一积分器，实现低偏置电流
▸采用连续时间ΔΣ调制技术，兼顾高分辨率和能效
▸通过微加热器多级加热实现单一传感器多气体检测
Abstract
This article presents an energy-efficient resistor-
to-digital converter (RDC) intended for use in a gas sensor
system to detect harmful benzene, toluene, ethyl-benzene, and
xylene (BTEX) compounds. The sensor is based on a resistive
micro-electromechanical systems (MEMS) sensor, whose selectiv-
ity is tuned by different heating levels of micro-heater, allowing
a single sensor to detect multiple gases. To achieve both high
resolution and energy efficiency, the sensor’s output current is
digitized