JSSC 2025第11期Image Sensors110nm背照式CMOS图像传感器工艺

An Indirect ToF Sensor With In-Pixel Adaptive 16-Scheme for Background Light Rejection and Floating Diffusion

提出一种自适应16方案间接飞行时间传感器，有效抑制背景光并降低噪声。

160×120分辨率，0.3-2.9m测距范围，<2.7%深度噪声，<2.1%非线性，30fps@50MHz调制频率

间接飞行时间背景光抑制像素级自适应电荷放大器浮动扩散交换

▸像素级自适应16方案控制子积分时间

▸像素级电荷放大器抑制共模背景光电荷

▸像素内浮动扩散交换技术减少失配

Abstract

This article presents a 160 × 120 indirect time- of-flight (iToF) sensor with an in-pixel adaptive 16-scheme that controls the number of sub-integration times adaptively to mitigate large background light (BGL) with alleviated reset noise penalty. A pixel-level charge amplifier is employed to suppress common-mode BGL charge, while the adaptive 16-scheme auto- matically selects the number of charge-subtraction operations with respect to BGL intensity to reduce the noise contribution from the char