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本文介绍了一种用于电容式3轴微加速度计的超低功耗二阶ΔΣ传感器前端，实现电容到数字的转换。该设计在1V供电下工作，功耗仅1.5μW，达到12位精度和1Hz带宽，并集成了信号增强和偏移补偿技术。
current and the capability of achieving high sensitivity, are emphasized in ultra-low-power applications. In [1], representing the current state-of-the-art in low-power 3-axis micro-accelerometers, capacitance-to-voltage and A/D conversions were performed separately. In this paper, an ultra-low-power 2nd-order ΔΣ sensor front-end with inherent capacitance-to-digital conversion [2] for a capacitive 3-axis micro-accelerometer is presented. The front-end is designed for 1V operation and 12b accuracy with a 1Hz BW using a 0.25μm CMOS technology. The schematic of the ΔΣ sensor front-end with the sensor element is shown in Fig. 32.2.1. The capacitive acceleration information from each proof mass is first converted to a charge and then to a
Mika Kämäräinen, Matti Paavola, Mikko Saukoski, Erkka Laulainen,
Lauri Koskinen, Marko Kosunen, Kari Halonen Helsinki University of Technology, Espoo, Finland The advantages of capacitive accelerometers [1], such as zero static bias