A Mode-Matching ΔΣ Closed-Loop VibratoryGyroscope Readout Interface with a 0.004°/s/√Hz Noise Floor over a 50Hz Band

📋 论文概要

本文提出一种基于模式匹配的ΔΣ闭环振动陀螺仪读出接口，通过力反馈克服了开环模式匹配带宽窄、比例因子变化大等缺陷，实现了0.004°/s/√Hz的噪声基底和50Hz带宽。

💡 主要创新点

• 采用ΔΣ闭环力反馈技术，在维持模式匹配高灵敏度优势的同时，解决了开环模式匹配导致的带宽受限和PVT敏感性问题。
• 通过闭环控制抑制了品质因数Q和谐振频率变化对比例因子和相位的影响，提高了系统稳定性和测量精度。

🏷 关键词

📄 原文摘要

floors, mode matching is necessary to moderate interface power dissipation. Mode matching increases sense displacements by the sense mode quality factor and thereby relaxes the precision requirements of the front-end, but also creates several difficulties as evidenced in a recent work [1]. Because it uses mode matching with open-loop sensing, the system in [1] has a bandwidth of less than 1Hz and is susceptible to substantial scale factor variation and phase uncertainty induced by variations of the Q and resonance frequency with PVT. Our design overcomes these limitations by using force feedback to achieve a stable scale factor, a well defined phase relationship, and a bandwidth well in excess of 50Hz, commensurate with the requirements of automotive and consumer

👥 作者与机构

Chinwuba D. Ezekwe1,2, Bernhard E. Boser1, 1

University of California, Berkeley, CA Robert Bosch Research and Technology Center, Palo Alto, CA 2 As micromachined vibratory gyroscopes push to lower noise