An RF MEMS Variable Capacitor with Intelligent Bipolar Actuation IBA, no failure is observed up to 1.7×108 cycles, indicating that the charging suppression mechanism is working successfully.

📋 论文概要

该论文提出了一种具有智能双极驱动（IBA）的RF MEMS可变电容器，通过电路实现电场方向切换，解决了传统MEMS电容器在长时间循环中因介质充电导致的失效问题，实现了超过1.7×10^8次循环无故障的可靠性。

💡 主要创新点

• 提出智能双极驱动（IBA）技术，通过正电压切换电场方向，避免介质充电积累，显著提升MEMS电容器的循环寿命。
• 设计包含电荷泵和开关矩阵的驱动电路，仅用正电压即可实现双极驱动，简化了系统集成。

🏷 关键词

📄 原文摘要

Etsuji Ogawa, Shinji Miyano, Tomohiro Saito, Tatsuya Ohguro, Takeshi Miyagi, Yoshiaki Sugizaki, Nobuaki Otsuka, Hideki Shibata, Yoshiaki Toyoshima The IBA operation described above is realized by a circuit whose block diagram is shown in Fig. 32.4.4. The voltages VACT and VHOLD are generated by the charge pump. The switch matrix activated by the signals TA and TAn enables to change the orientation of the electric field with only positive voltages. Suppose TA = “H” and TAn = “L”: in this case, VHOLD and 0V are supplied to the ATE and the ABE, respectively, during the hold state. When the charge detection starts, the ABE voltage VBOT is raised to VBUMP and, after the ATE is cut-off from VHOLD, VBOT is dropped to 0V. At this moment, the ATE voltage VTOP also drops, due to the capacitive coupling between the ATE and the ABE. Since the actuator capacitance is dependent on the actuator being up or down, the

👥 作者与机构

Tamio Ikehashi, Takayuki Miyazaki, Hiroaki Yamazaki, Atsushi Suzuki,